High Vacuum And Coating System Specialists

Lake Industrial Estate
Shebbear
Devon
EX21 5SP

Tel  08453 7070 41
Fax 08453 7070 42

Wordentec QLC 800
Wordentec presents the QLC800 versatile high vacuum coating system. The QLC 800 system has been enabled by securing a batch of quality process chambers manufactured by Balzers AG. As a result the QLC system provides a cost effective basis for a production tool as well as a process development tool.
Wordentec can offer a wide range of accessories for the QLC800. This system also offers compatibility with many industry standard Balzers instruments and accessories.

Options include
  • Pressure control
  • Mass flow control
  • substrate heating
  • Substrate bias (rf or dc)
  • Multiple sources
  • Rear surface heating
  • Front surface heating
  • Additional sources (thermal or ebeam)

2 DC+1 RF Magnetron
Source Specification
Source 16" DC Magnetron
Source 2 6" DC Magnetron
Power SupplyAdvanced Energy
Source ControllerPinnacle
Dimensions
Chamber Size L x W x H800mm base plate
Substrate Carrier 800mm
Source to Substrate any up to 900mm
Performance
High Vacuum PumpPfeiffer 2200 turbo
Pump down time5.5E-07
Ultimate Pressure7.0x10E-08
Maximum Temperature350 max
Chamber Cooling6 channel