Wordentec presents the QLC800 versatile high vacuum coating system. The QLC 800 system has been enabled by securing a batch of quality process chambers manufactured by Balzers AG. As a result the QLC system provides a cost effective basis for a production tool as well as a process development tool.
Wordentec can offer a wide range of accessories for the QLC800. This system also offers compatibility with many industry standard Balzers instruments and accessories.
Options include
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Pressure control
- Mass flow control
- substrate heating
- Substrate bias (rf or dc)
- Multiple sources
- Rear surface heating
- Front surface heating
- Additional sources (thermal or ebeam)